Conventional diamond grinding wheel inevitably single crystal sapphire substrate surface damage

Among them, the use of fixed abrasive ultra-precision grinding technology is currently a hot research and has achieved remarkable results, but the traditional diamond grinding wheel inevitably will produce single-crystal sapphire substrate surface damage, you need to follow the chemical mechanical polishing to remove the damaged layer,  polycrystalline diamond the processing efficiency of the substrate. In response to these problems, in order to efficiently lossless processing monocrystalline sapphire substrates, we propose the use of soft abrasive grinding wheel single-crystal  synthetic diamond  methods, the use of abrasive wheel, single-crystal sapphire additives and chemical reaction between the solid phase and a soft abrasive mechanical friction to achieve single-crystal sapphire substrates super smooth, low damage grinding.