2013年10月9日星期三

Some types of components need epitaxial substrate epitaxial film thickness of the epitaxial layer also will continue to increase

As the semiconductor industry, IC scale has been expanded, the quality of the substrate sheet manufacturers are increasingly high  Diamond blade . Requires not only high-quality  cutting tools  polished surface with crystals, while some types of components need epitaxial substrate epitaxial film thickness of the epitaxial layer also will continue to increase. In previous years the thickness of the epitaxial layer epitaxial  abrasive wheels  is about 30, is now mainstream epitaxial thickness increased to between 50-60. Increasing the thickness of the epitaxial layer epitaxy, epi chance of defects increases. In order to solve the slip lines produced after epitaxial defects, all manufacturers put a lot of research.

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