Polycrystalline silicon thin films with the ordinary compared with the more superior film piezoresistive characteristics

Polysilicon thin film piezoresistive properties make it good in piezoresistive sensors have been widely applied. Existing research results show that the polycrystalline silicon thin films as compared with the ordinary polycrystalline silicon thin film has a  grinding wheel  piezoresistive characteristics, so has broad application prospects. In this paper, thin films of polysilicon piezoresistive  abrasive grinding  were studied, including processing conditions on the piezoresistive properties of silicon and polycrystalline silicon thin films Young's Modulus. Piezoresistive characteristics on the basis of research on nano-film polycrystalline silicon pressure sensor applied research. In the process conditions on the piezoresistive characteristics of the study.