PSNF piezoresistive properties has not yet attracted domestic and foreign researchers' attention

Polysilicon thin film piezoresistive properties make it good in the MEMS piezoresistive sensors have been widely applied. The research results show that the polycrystalline  abrasive wheels  (PSNF) has a more superior piezoresistive characteristics, has broad application prospects. However, PSNF piezoresistive properties has not yet attracted domestic and  grinding wheel ' attention, basic research in this area nearly empty. In this paper, the use of low pressure chemical vapor deposition (LPCVD) were  cubic boron nitride  different structures polysilicon thin films, on the basis of the experimental PSNF piezoresistive characteristics of a systematic study, to establish a theoretical model of polysilicon piezoresistive characteristics for such functional nanomaterials application development foundation.