At the same time meet the high precision and large range of measurement requirements Situation

For complex surface contour measurement methods has been difficult to satisfy both high accuracy and large range of measurement requirements of status quo, with the Ministry of Education Support Program for New Century Excellent Talents Project (Project Number: NCET-07-0262) "orthogonal grating multi-DOF measurement and related technology research, "relying on the design of a self-alignment system for  synthetic diamond  Abbe compensation and  cutting tools  sensor combination grating profile measurement system, and around the measurement system was related design, analysis, grinding wheel  studies and other research experimental work, the specific studies are as follows: First, analyze, compare the currently used the advantages and disadvantages of several surface profiler, combined with the characteristics of research projects.